SLQ-QT105

High purity millilitre flow meter for hydrocarbons. Tailored to the integration in demanding coating systems, the SLQ-QT105 is a semicon grade-sensor solution for flow rates of up to 120ml/min of hydrocarbon-based liquids like photoresists and solvents. Based on Sensirion's proven thermal microsensor technology, it opens new perspectives in terms of sensitivity, reliability and speed. The short response time of the SLQ-QT105 allows the accurate monitoring of highly dynamic processes such as fast dosing operations. Equipped with fittings for 4x3mm PFA tubing, this reliable device works without any moving parts measuring non-invasively through the wall of a straight flow path. A smart digital interface and robust RS485 communication is offered for long distance and bus capability.

• Full scale flow rate (IPA) of 120ml/min, sensitive to low flow rates, straight flow channel
• Accuracy of 10%, high purity at up to 2ml/s, super-fast sampling speed
• Repeatability (IPA) of 2%, fast measurement response for dosing monitoring
• Maximum operating pressure of 12bar
• Supply voltage of 4.5V to 5.5V
• Average supply current of 20µA
• Maximum supply current of 100µA
• Analog voltage, analogue current, I²C, RS485 interfaces
• Package size (L x W x H) of 65 x 33.5 x 20mm3
• Used in semiconductor industry